The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Mar. 27, 2020
International Business Machines Corporation, Armonk, NY (US);
Alexander Reznicek, Troy, NY (US);
Balasubramanian S. Pranatharthi Haran, Watervliet, NY (US);
Praneet Adusumilli, Somerset, NJ (US);
Ruilong Xie, Niskayuna, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A semiconductor structure is provided including a gate cut region in which the contact trench size has been optimized to increase local interconnect connectivity. The semiconductor structure can include at least one gate structure located laterally adjacent to a gate cut region. At least one metal-containing contact structure is located in the gate cut region, wherein the at least one at least one metal-containing contact structure is confined by a pair of gate dielectric spacers, wherein a first gate dielectric spacer of the pair of gate dielectric spacers has a first width and is located laterally adjacent to the at least one gate structure, and a second gate dielectric spacer of the pair of gate dielectric spacers has a second width and is located laterally adjacent to the at least one metal-containing contact structure, wherein the first width is greater than the second width.