The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
May. 13, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Tomoya Endo, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 31/20 (2006.01); G01R 31/28 (2006.01); G01R 1/04 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2887 (2013.01); G01R 1/0408 (2013.01);
Abstract
An aligning mechanism according to one aspect of the present disclosure includes a mounting table on which a substrate is placed; a holding section configured to hold the mounting table from below; lifting pins configured to raise or lower the mounting table with respect to the holding section; and an aligner configured to support the holding section from below, and to change a position of the holding section relative to the lifting pins. In the holding section and the aligner, through-holes are formed such that the lifting pins can penetrate the through-holes.