The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 2021

Filed:

Apr. 21, 2020
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Nazila Dadvand, Richardson, TX (US);

Christopher Daniel Manack, Flower Mound, TX (US);

Salvatore Frank Pavone, Murphy, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01B 13/00 (2006.01); H01B 1/02 (2006.01);
U.S. Cl.
CPC ...
H01B 13/0036 (2013.01); H01B 1/026 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 24/43 (2013.01); H01L 24/45 (2013.01); H01L 24/85 (2013.01); H01L 2224/04042 (2013.01); H01L 2224/291 (2013.01); H01L 2224/2919 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/43 (2013.01); H01L 2224/45147 (2013.01); H01L 2224/45184 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/73265 (2013.01); H01L 2224/85205 (2013.01);
Abstract

A nanostructure barrier for copper wire bonding includes metal grains and inter-grain metal between the metal grains. The nanostructure barrier includes a first metal selected from nickel or cobalt, and a second metal selected from tungsten or molybdenum. A concentration of the second metal is higher in the inter-grain metal than in the metal grains. The nanostructure barrier may be on a copper core wire to provide a coated bond wire. The nanostructure barrier may be on a bond pad to form a coated bond pad. A method of plating the nanostructure barrier using reverse pulse plating is disclosed. A wire bonding method using the coated bond wire is disclosed.


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