The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2021

Filed:

Nov. 18, 2019
Applicant:

Invensas Corporation, San Jose, CA (US);

Inventors:

Hong Shen, Palo Alto, CA (US);

Liang Wang, Newark, CA (US);

Guilian Gao, San Jose, CA (US);

Assignee:

Invensas Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 21/56 (2006.01); H01L 21/78 (2006.01); H01L 21/683 (2006.01); H01L 25/00 (2006.01); H01L 21/768 (2006.01); H01L 21/306 (2006.01); H01L 21/304 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
H01L 24/94 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01); H01L 21/31051 (2013.01); H01L 21/568 (2013.01); H01L 21/6835 (2013.01); H01L 21/76877 (2013.01); H01L 21/76898 (2013.01); H01L 21/78 (2013.01); H01L 24/32 (2013.01); H01L 24/83 (2013.01); H01L 25/50 (2013.01); H01L 2221/68327 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/83005 (2013.01); H01L 2224/83895 (2013.01); H01L 2224/83896 (2013.01); H01L 2225/06541 (2013.01); H01L 2924/1032 (2013.01); H01L 2924/10253 (2013.01); H01L 2924/1205 (2013.01); H01L 2924/1207 (2013.01); H01L 2924/1304 (2013.01); H01L 2924/1436 (2013.01);
Abstract

Systems and methods for providing 3D wafer assembly with known-good-dies are provided. An example method compiles an index of dies on a semiconductor wafer and removes the defective dies to provide a wafer with dies that are all operational. Defective dies on multiple wafers may be removed in parallel, and resulting wafers with all good dies stacked in 3D wafer assembly. In an implementation, the spaces left by removed defective dies may be filled at least in part with operational dies or with a fill material. Defective dies may be replaced either before or after wafer-to-wafer assembly to eliminate production of defective stacked devices, or the spaces may be left empty. A bottom device wafer may also have its defective dies removed or replaced, resulting in wafer-to-wafer assembly that provides 3D stacks with no defective dies.


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