The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2021
Filed:
Jun. 28, 2019
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Laisheng Sun, Gilbert, AZ (US);
Yi-Chia Lee, Chupei, TW;
Lili Wang, Chandler, AZ (US);
Aiping Wu, Chandler, AZ (US);
Assignee:
Versum Materials US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 11/00 (2006.01); B08B 3/08 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0047 (2013.01); B08B 3/08 (2013.01); C11D 7/261 (2013.01); C11D 7/265 (2013.01); C11D 7/3218 (2013.01); C11D 7/3245 (2013.01); H01L 21/02057 (2013.01);
Abstract
A microelectronic device (semiconductor substrate) cleaning composition is provided that comprises water; oxalic acid, and two or more corrosion inhibitors and methods of using the same.