The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Sep. 20, 2019
Tokyo Electron Limited, Tokyo, JP;
Takashi Sugimoto, Nirasaki, JP;
Shinya Okano, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate transfer method includes loading a transfer container on a loading part, transferring the substrate between the transfer container and the housing by a transfer mechanism including a substrate support part supporting the substrate, acquiring a reference height of each substrate in the transfer container before performing the loading the transfer container, detecting a height of each substrate in the transfer container after the acquiring the reference height and before the transferring the substrate, obtaining a first difference value between the detected height and the reference height, with respect to one substrate in the transfer container, determining an entry height of the substrate support part at which the substrate support part enters the transfer container by selecting one of a first entry height corresponding to the reference height of the one substrate and a second entry height corrected based on the first difference value.