The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Mar. 13, 2019
Asml Netherlands B.v., Veldhoven, NL;
Miao Yu, Best, NL;
Petrus Martinus Gerardus Johannes Arts, Echt, NL;
Erik Henricus Egidius Catharina Eummelen, Veldhoven, NL;
Giovanni Luca Gattobigio, Eindhoven, NL;
Maarten Holtrust, Eindhoven, NL;
Han Henricus Aldegonda Lempens, Weert, NL;
Ferdy Migchelbrink, Veldhoven, NL;
Theodorus Wilhelmus Polet, Geldrop, NL;
Gheorghe Tanasa, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A cleaning device for an apparatus for processing production substrates, the cleaning device including: a body having dimensions similar to the production substrates so that the cleaning device is compatible with the apparatus, the body having a first major surface and a second major surface facing in the opposite direction to the first major surface; a chamber within the body configured to accommodate contaminants; an inlet from the first major surface to the chamber and configured to allow contaminants to be drawn into the chamber by a flow of fluid; and an outlet from the chamber to the second major surface, the cleaning device being configured to allow the fluid to exit the chamber but to prevent a contaminant leaving the chamber.