The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2021

Filed:

Oct. 23, 2019
Applicant:

Win Semiconductors Corp., Tao Yuan, TW;

Inventors:

Chia-Ming Chang, Tao Yuan, TW;

Jung-Tao Chung, Tao Yuan, TW;

Yan-Cheng Lin, Tao Yuan, TW;

Lung-Yi Tseng, Tao Yuan, TW;

Assignee:

Win Semiconductors Corp., Tao Yuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/095 (2006.01); H01L 29/778 (2006.01); H01L 29/80 (2006.01);
U.S. Cl.
CPC ...
H01L 27/095 (2013.01); H01L 29/7786 (2013.01); H01L 29/802 (2013.01);
Abstract

A monolithic integrated circuit device formed in a multi-layer structure comprises a low-pinch-off-voltage pHEMT and a high-pinch-off-voltage pHEMT. A Schottky layer in the multi-layer structure contains at least three stacked regions of semiconductor material, wherein each of the two adjacent stacked regions differs in material and provides a stacked region contact interface therebetween. The gate-sinking pHEMTs each includes a gate contact, a first gate metal layer, a gate-sinking region, and a gate-sinking bottom boundary. The first gate metal layers are in contact with the topmost stacked region of the Schottky layer. The gate-sinking regions are beneath the first gate metal layers. The gate-sinking bottom boundary of the high-pinch-off-voltage pHEMT, which is closer to the semiconductor substrate than the gate-sinking bottom boundary of the low-pinch-off-voltage pHEMT, locates within 10 Å above or below one of the stacked region contact interfaces of the Schottky layer.


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