The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

May. 30, 2017
Applicants:

Shinkawa Ltd., Tokyo, JP;

Valqua, Ltd., Tokyo, JP;

Inventors:

Osamu Watanabe, Tokyo, JP;

Tomonori Nakamura, Tokyo, JP;

Yoshihito Hagiwara, Tokyo, JP;

Yuji Kanai, Tokyo, JP;

Assignees:

SHINKAWA LTD., Tokyo, JP;

VALQUA, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 24/83 (2013.01); H01L 21/6838 (2013.01); H01L 24/13 (2013.01); H01L 24/75 (2013.01); H01L 2224/75654 (2013.01); H01L 2224/83862 (2013.01); H01L 2924/3641 (2013.01);
Abstract

A method of mounting a die includes: preparing a die having a bump formation surface on which a plurality of bump electrodes are formed; disposing a vacuum suction tool having a suction surface above the die such that the suction surface faces toward the bump formation surface; sandwiching a porous sheet between the suction surface and the bump formation surface and suctioning the die by the vacuum suction tool; and mounting the die that has been suctioned by the vacuum suction tool in a bonding region of a substrate with an adhesive material interposed therebetween, the porous sheet having a thickness equal to or greater than the protrusion height of the bump electrodes on the bump formation surface. Stabilization and ease of maintenance of vacuum suction can thereby be improved.


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