The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2021
Filed:
Jul. 26, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vivek B Shah, Sunnyvale, CA (US);
Vinayak Vishwanath Hassan, Santa Clara, CA (US);
Bhaskar Kumar, Santa Clara, CA (US);
Ganesh Balasubramanian, Fremont, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/52 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32697 (2013.01); H01J 37/32091 (2013.01); H01J 37/32449 (2013.01); H01J 37/32715 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/332 (2013.01);
Abstract
Apparatus and methods for generating a flow of radicals are provided. An ion blocker is positioned a distance from a faceplate of a remote plasma source. The ion blocker has openings to allow the plasma to flow through. The ion blocker is polarized relative to a showerhead positioned on an opposite side of the ion blocker so that there are substantially no plasma gas ions passing through the showerhead.