The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2021
Filed:
Apr. 09, 2018
Applicant:
Eo Technics Co., Ltd., Anyang-si, KR;
Inventors:
Tai O. Chung, Uiwang-si, KR;
Dae Ho Jung, Goyang-si, KR;
In Su Kim, Seoul, KR;
Gi Hong Seo, Gunpo-si, KR;
Assignee:
EO TECHNICS CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B29C 51/10 (2006.01); B29C 51/18 (2006.01); B29C 51/42 (2006.01); H01L 21/56 (2006.01); H01L 23/00 (2006.01); B29L 31/34 (2006.01);
U.S. Cl.
CPC ...
B29C 51/10 (2013.01); B29C 51/18 (2013.01); B29C 51/421 (2013.01); H01L 21/561 (2013.01); H01L 21/67092 (2013.01); H01L 21/67098 (2013.01); H01L 21/67115 (2013.01); H01L 24/94 (2013.01); B29L 2031/3406 (2013.01);
Abstract
A warpage reduction device the present disclosure includes a jig having a warped shape capable of distributing stress of a workpiece, a light source heating the workpiece so as to be flat, a pressurizer applying pressure to the heated workpiece to be pressed against the jig so as to be deformed, a cooler cooling the deformed workpiece, and a controller controlling operations of the light source, the pressurizer, and the cooler.