The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Sep. 16, 2019
Asml Netherlands B.v., Veldhoven, NL;
Andrey Nikipelov, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Christian Gerardus Norbertus Hendricus Marie Cloin, Eindhoven, NL;
Edwin Te Sligte, Waalre, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Ferdinandus Martinus Jozef Henricus Van De Wetering, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A component for use in a patterning device environment including a patterning device, wherein the component is treated to suppress EUV plasma-induced contaminant release and/or atomic hydrogen or other radicals induced defectivity. A conduit array comprising at least one conduit, wherein the at least one conduit has been treated to promote adhesion of a contaminant to the at least one conduit.