The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Jan. 16, 2018
Tokyo Electron Limited, Tokyo, JP;
Masato Hayashi, Koshi, JP;
Kohei Noguchi, Koshi, JP;
Daisuke Kajiwara, Koshi, JP;
Koudai Higashi, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An apparatus includes flow path unitsA toK configured to form flow pathsA toK through which a fluid supplied to a target object W is flown; a laser light irradiatorconfigured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elementsA andB provided at the optical path having passed through the flow path units; a detectorconfigured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unitprovided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.