The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Dec. 26, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Alexander Lerner, San Jose, CA (US);
Kim Vellore, San Jose, CA (US);
Ami Sade, Sunnyvale, CA (US);
Steven Sansoni, Livermore, CA (US);
Andrew Constant, Cupertino, CA (US);
Kevin Moraes, Fremont, CA (US);
Roey Shaviv, Palo Alto, CA (US);
Niranjan Kumar, Cupertino, CA (US);
Jeffrey Brodine, Los Gatos, CA (US);
Michael Karazim, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Substrate carrier apparatus having a hard mask are disclosed herein. In some embodiments, a substrate carrier apparatus includes a carrier body having a support surface to support a substrate; and a mask assembly disposed above the support surface. The mask assembly includes an annular frame disposed atop the support surface; and a hard mask coupled to and disposed within the annular frame above the support surface, wherein the hard mask includes one or more openings arranged in a predetermined pattern and disposed through the hard mask, and wherein the hard mask includes a plurality of spacer elements extending from a bottom surface of the hard mask.