The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Oct. 05, 2018
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Ding-Shiang Wang, Tainan, TW;

Jia-Jen Chang, Yunlin County, TW;

Ming-Sheng Leu, Hsinchu County, TW;

Tai-Sheng Chen, Kaohsiung, TW;

Chin-Te Shih, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05F 3/04 (2006.01); H01L 21/673 (2006.01); B65G 47/74 (2006.01); C23C 14/02 (2006.01); C23C 14/14 (2006.01); C23C 14/08 (2006.01); C23C 14/00 (2006.01); C23C 14/32 (2006.01);
U.S. Cl.
CPC ...
H05F 3/04 (2013.01); B65G 47/74 (2013.01); C23C 14/0021 (2013.01); C23C 14/024 (2013.01); C23C 14/083 (2013.01); C23C 14/14 (2013.01); C23C 14/325 (2013.01); H01L 21/67353 (2013.01); H01L 21/67366 (2013.01); H01L 21/67396 (2013.01);
Abstract

An ESD protection composite structure includes a link layer, a progressive layer, and a composite layer. The link layer is used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer includes a metal material. The progressive layer is disposed on the link layer, wherein the material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. The composite layer is disposed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×10Ω/sq to 1×10Ω/sq.


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