The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Jun. 13, 2019
Applicant:

Western Digital Technologies, Inc., San Jose, CA (US);

Inventors:

Yuji Takahashi, San Jose, CA (US);

Masatoshi Nishikawa, Nagoya, JP;

Wei Kuo Shih, Cupertino, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/24 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/249 (2013.01); H01L 27/2427 (2013.01); H01L 45/06 (2013.01); H01L 45/1683 (2013.01);
Abstract

An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. Memory openings are formed through the alternating stack. Protruding tip portions are formed on each of the sacrificial material layers around the memory openings. A plurality of insulating spacers is formed within each memory opening between each vertically neighboring pair of tip portions of the sacrificial material layers. A phase change memory material and a vertical bit line are formed within each of the memory openings. The phase change memory material can be formed as a vertical stack of discrete annular phase change memory material portions, or can be formed as a continuous phase change memory material layer. Each of the sacrificial material layer can be replaced by an electrically conductive layer.


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