The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Sep. 28, 2017
Applied Materials Israel Ltd., Rehovot, IL;
Assaf Asbag, Alfei Menashe, IL;
Ohad Shaubi, Yavne, IL;
Kirill Savchenko, Lod, IL;
Shiran Gan-Or, Ganei Tiqwa, IL;
Boaz Cohen, Lehavim, IL;
Zeev Zohar, Migdal, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
There are provided a classifier and a method of classifying defects in a semiconductor specimen. The classifier enables assigning each class to a classification group among three or more classification groups with different priorities. Classifier further enables setting purity, accuracy and/or extraction requirements separately for each class, and optimizing the classification results in accordance with per-class requirements. During training, the classifier is configured to generate a classification rule enabling the highest possible contribution of automated classification while meeting per-class quality requirements defined for each class.