The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Apr. 06, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tadashi Mitsunari, Yamanashi, JP;
Satoshi Tanaka, Tokyo, JP;
Tsuyoshi Moriya, Yamanashi, JP;
Toshiya Matsuda, Tokyo, JP;
Masaaki Miyagawa, Miyagi, JP;
Kenya Iwasaki, Kumamoto, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01K 11/32 (2021.01); G01K 11/324 (2021.01);
U.S. Cl.
CPC ...
G01K 11/32 (2013.01); G01K 11/324 (2021.01);
Abstract
A temperature measurement substrate according to an embodiment of the present disclosure includes: a substrate which is any one of a semiconductor wafer and a substrate for a flat panel display; and at least one optical fiber laid on a surface of the substrate and having a first pattern portion and a second pattern portion formed more densely than the first pattern portion.