The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Jun. 12, 2018
Applicant:
Pdf Solutions, Inc., Santa Clara, CA (US);
Inventors:
Tomonori Honda, Santa Clara, CA (US);
Rohan D. Kekatpure, Sunnyvale, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Assignee:
PDF Solutions, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); H01L 21/67 (2006.01); G05B 13/02 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41885 (2013.01); G05B 13/0265 (2013.01); H01L 21/67276 (2013.01); G05B 2219/32338 (2013.01); G05B 2219/33034 (2013.01); G05B 2219/37436 (2013.01); G05B 2219/42155 (2013.01); G05B 2219/45031 (2013.01);
Abstract
Robust machine learning predictions. Temporal dependencies of process targets for different machine learning models can be captured and evaluated for the impact on process performance for target. The most robust of these different models is selected for deployment based on minimizing variance for the desired performance characteristic.