The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Mar. 08, 2019
Applicant:
Pdf Solutions, Inc., Santa Clara, CA (US);
Inventors:
Tomonori Honda, Santa Clara, CA (US);
Lin Lee Cheong, San Jose, CA (US);
Lakshmikar Kuravi, Campbell, CA (US);
Assignee:
PDF Solutions, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/3183 (2006.01); G06N 20/00 (2019.01); G06F 30/30 (2020.01);
U.S. Cl.
CPC ...
G01R 31/31835 (2013.01); G06F 30/30 (2020.01); G06N 20/00 (2019.01);
Abstract
A model is generated for predicting failures at the wafer production level. Input data from sensors is stored as an initial dataset, then data exhibiting excursions or useless impact is removed from the dataset. The dataset is converted into target features, where the target features are useful in predicting whether a wafer will be normal or not. A trade-off between positive and negative results is selected, and a plurality of predictive models are created. The final model is selected based on the trade-off criteria, and deployed.