The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2021
Filed:
Dec. 04, 2018
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Luu Thanh Nguyen, San Jose, CA (US);
Mahmud Halim Chowdhury, Richardson, TX (US);
Ashok Prabhu, San Jose, CA (US);
Anindya Poddar, Sunnyvale, CA (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01); C23C 14/12 (2006.01); C23F 11/10 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
C23C 14/12 (2013.01); C23F 11/10 (2013.01); H01L 21/288 (2013.01); H01L 21/3205 (2013.01); H01L 21/76838 (2013.01);
Abstract
In a described example, a method for passivating a copper structure includes: passivating a surface of the copper structure with a copper corrosion inhibitor layer; and depositing a protection overcoat layer with a thickness less than 35 μm on a surface of the copper corrosion inhibitor layer.