The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2021

Filed:

Sep. 02, 2014
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Nobukatsu Machii, Yokohama, JP;

Fuminori Hayano, Tokyo, JP;

Akitoshi Kawai, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/02 (2006.01); G01N 23/04 (2018.01); G01N 23/046 (2018.01); G01B 15/04 (2006.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); G01B 15/04 (2013.01); G01N 23/046 (2013.01); G01N 2223/304 (2013.01); G01N 2223/306 (2013.01); G01N 2223/646 (2013.01);
Abstract

A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a specimen with a detection unit to sequentially inspect a plurality of specimens on the basis of an acquired transmission image, includes a setting unit that sets a region to be inspected on a portion of the specimen; a determination unit that determines the non-defectiveness of the region to be inspected by using a transmission image of the x-ray that passed through the region to be inspected; a correction unit that performs a correction on the region to be inspected on the basis of a determination result by the determination unit; and a display control unit that displays the corrected region to be inspected corrected by the correction unit.


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