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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11011398 B1

PDFFull Text
Date of Patent:
May. 18, 2021

Filed:

Nov. 29, 2018

Fume determination method, substrate processing method, and substrate processing equipment

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Toru Endo, Kyoto, JP;

Masayuki Hayashi, Kyoto, JP;

Nobuyuki Shibayama, Kyoto, JP;

Hideji Naohara, Kyoto, JP;

Hiroaki Kakuma, Kyoto, JP;

Yuji Okita, Kyoto, JP;

Tatsuya Masui, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd., Kyoto, JP;

Attorney:

JCIPRNET

Primary Examiner:

Shervin K Nakhjavan

Int. Cl.
CPC ...
G06K 9/00 (2006.01); H01L 21/67 (2006.01); G01N 21/892 (2006.01); G01N 21/94 (2006.01); G06T 7/00 (2017.01); H01L 21/687 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); G01N 21/892 (2013.01); G01N 21/94 (2013.01); G06T 7/001 (2013.01); H01L 21/67051 (2013.01); H01L 21/67288 (2013.01); H01L 21/681 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01); G01N 2021/8928 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30164 (2013.01);
Abstract

In equipment that supplies a processing liquid on a top surface of a substrate while holding the substrate horizontally in a chamber a generation status of fumes is determined. Specifically, an image of a predetermined imaging area in the chamber is captured. Then, the generation status of fumes in the chamber is determined based on luminance values of the captured image acquired by the capturing of an image. Accordingly, it is possible to quantitatively determine whether a generation status of fumes in a chamber is normal.

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