The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Dec. 04, 2015
Acm Research (Shanghai) Inc., Shanghai, CN;
Hui Wang, Shanghai, CN;
Zhaowei Jia, Shanghai, CN;
Hongchao Yang, Shanghai, CN;
Jun Wu, Shanghai, CN;
Jian Wang, Shanghai, CN;
ACM Research (Shanghai) Inc., Shanghai, CN;
Abstract
An apparatus for holding a substrate () has a chuck cup (), a seal shell (), a chuck plate () and a vertical driving device (). The seal shell () has a bottom wall (), an outer wall () and an inner wall (). The inner wall () forms a lip seal portion (). The bottom wall () and the outer wall () of the seal shell () respectively wrap the bottom surface and the outer surface of the base portion () of the chuck cup (). The lip seal portion () wraps the supporting portion () of the chuck cup () for sealing the edge of the front side of the substrate (). The apparatus protects the edge of the front side of the substrate, the back side of the substrate and the chuck cup from contacting with the electrolyte solution.