The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Oct. 27, 2015
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Matthew Thorseth, Westminster, MA (US);
Mark Scalisi, Salem, NH (US);
Corey Ciullo, Brookline, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Ma, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 3/38 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01); C25D 5/02 (2006.01); C25D 7/12 (2006.01);
U.S. Cl.
CPC ...
C25D 3/38 (2013.01); C25D 5/02 (2013.01); C25D 7/123 (2013.01); H01L 21/2885 (2013.01); H01L 21/76879 (2013.01); H01L 21/76898 (2013.01);
Abstract
Copper electroplating baths containing primary alcohol alkoxylate block copolymers and ethylene oxide/propylene oxide random copolymers having specific HLB ranges are suitable for filling vias with copper, where such copper deposits are substantially void-free and substantially free of surface defects.