The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Jun. 22, 2017
Applicant:
Fujikin Incorporated, Osaka, JP;
Inventors:
Yohei Sawada, Osaka, JP;
Masaaki Nagase, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Assignee:
FUJIKIN INCORPORATED, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/42 (2006.01); G05D 7/00 (2006.01); G01F 15/00 (2006.01); G01F 25/00 (2006.01); G01F 1/36 (2006.01);
U.S. Cl.
CPC ...
G01F 1/42 (2013.01); G01F 15/005 (2013.01); G01F 25/003 (2013.01); G01F 25/0007 (2013.01); G01F 25/0053 (2013.01); G01F 25/0084 (2013.01); G05D 7/00 (2013.01); G01F 1/363 (2013.01);
Abstract
In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.