The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2021
Filed:
Sep. 14, 2017
Applicant:
United Microelectronics Corp., Hsinchu, TW;
Inventors:
Assignee:
UNITED MICROELECTRONICS CORP., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H01L 29/06 (2006.01); H01L 29/49 (2006.01); H01L 23/528 (2006.01); H01L 29/66 (2006.01); H01L 23/532 (2006.01); H01L 49/02 (2006.01); H01L 23/522 (2006.01); G06F 30/39 (2020.01); G06F 30/392 (2020.01); G06F 119/18 (2020.01);
U.S. Cl.
CPC ...
H01L 27/0629 (2013.01); G06F 30/39 (2020.01); G06F 30/392 (2020.01); H01L 23/528 (2013.01); H01L 23/5228 (2013.01); H01L 23/53257 (2013.01); H01L 28/20 (2013.01); H01L 29/0649 (2013.01); H01L 29/4966 (2013.01); H01L 29/66545 (2013.01); G06F 2119/18 (2020.01);
Abstract
A semiconductor structure including a substrate, dummy conductive structures, and resistor elements is provided. The substrate includes a resistor region and has isolation structures and dummy support patterns located in the resistor region. Each of the isolation structures is located between two adjacent dummy support patterns. Each of the dummy conductive structures is disposed on each of the isolation structures and equidistant from the dummy support patterns on both sides. The resistor elements are disposed above the dummy conductive structures and aligned with the dummy conductive structures.