The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2021

Filed:

Mar. 22, 2019
Applicant:

Winbond Electronics Corp., Taichung, TW;

Inventor:

Feng-Jung Chang, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76224 (2013.01); H01L 27/10805 (2013.01); H01L 27/10891 (2013.01);
Abstract

A dynamic random access memory (DRAM) and a method of fabricating the same are provided. The DRAM includes a substrate, a plurality of first isolation structures, a plurality of word line structures, a plurality of second isolation structures, and a plurality of third isolation structures. The plurality of first isolation structures are located in the substrate to define a plurality of active areas arranged along a first direction, wherein the plurality of active areas and the plurality of first isolation structures are alternately arranged along the first direction. The plurality of word line structures pass through the plurality of active areas and the plurality of first isolation structures. The plurality of word line structures are arranged along a second direction and extended along a third direction. The plurality of second isolation structures are located in the substrate where the plurality of word line structures are interleaved with the plurality of active areas and located between the two adjacent first isolation structures. The plurality of third isolation structures cover the plurality of word line structures.


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