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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10954479 B1

PDFFull Text
Date of Patent:
Mar. 23, 2021

Filed:

Jun. 13, 2017

Composition for surface treatment and surface treatment method using the same

Applicant:

Fujimi Incorporated, Aichi, JP;

Inventor:

Yasuto Ishida, Aichi, JP;

Assignee:

FUJIMI INCORPORATED;

Attorney:

Katten Muchin Rosenman LLP

Primary Examiner:

Gregory E Webb

Int. Cl.
CPC ...
C11D 7/32 (2006.01); C11D 7/36 (2006.01); H01L 21/02 (2006.01); C11D 3/36 (2006.01); H01L 21/3105 (2006.01); C11D 7/34 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C11D 7/36 (2013.01); C11D 3/36 (2013.01); C11D 7/34 (2013.01); C11D 11/0047 (2013.01); H01L 21/02065 (2013.01); H01L 21/02074 (2013.01); H01L 21/31053 (2013.01); H01L 21/02068 (2013.01);
Abstract

The present invention relates to a composition for surface treatment including: a phosphonic acid compound containing two or more nitrogen atoms; and water, wherein the pH is 6 or less, and the composition for surface treatment is used for treating a surface of a polishing-completed object to be polished having a tungsten-containing layer. According to the present invention, there is provided a means capable of inhibiting dissolution of the tungsten-containing layer provided on a polishing-completed object to be polished when a surface treatment is performed.

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Ishida, Yasuto. (2021). Composition for surface treatment and surface treatment method using the same (U.S. Patent No. 10954479). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10954479

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