The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 2021

Filed:

Dec. 31, 2014
Applicants:

Stmicroelectronics, Inc., Coppell, TX (US);

International Business Machines Corporation, Armonk, NY (US);

Inventors:

John H. Zhang, Altamont, NY (US);

Carl Radens, LaGrangeville, NY (US);

Lawrence A. Clevenger, LaGrangeville, NY (US);

Yiheng Xu, Hopewell Junction, NY (US);

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/165 (2006.01); H01L 27/092 (2006.01); H01L 29/66 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01); H01L 21/823871 (2013.01); H01L 21/823885 (2013.01); H01L 27/092 (2013.01); H01L 29/165 (2013.01); H01L 29/66666 (2013.01);
Abstract

Vertical GAA FET structures are disclosed in which a current-carrying nanowire is oriented substantially perpendicular to the surface of a silicon substrate. The vertical GAA FET is intended to meet design and performance criteria for the 7 nm technology generation. In some embodiments, electrical contacts to the drain and gate terminals of the vertically oriented GAA FET can be made via the backside of the substrate. Examples are disclosed in which various n-type and p-type transistor designs have different contact configurations. In one example, a backside gate contact extends through the isolation region between adjacent devices. Other embodiments feature dual gate contacts for circuit design flexibility. The different contact configurations can be used to adjust metal pattern density.


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