The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Mar. 18, 2019
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Hisashi Arakida, Tokyo, JP;
Hiroyuki Hiraga, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/304 (2006.01); H01L 21/67 (2006.01); B28D 5/00 (2006.01); H01L 21/02 (2006.01); B28D 5/02 (2006.01); B24B 27/06 (2006.01); B08B 1/04 (2006.01); B08B 3/02 (2006.01); B08B 7/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3043 (2013.01); B08B 1/04 (2013.01); B08B 3/02 (2013.01); B08B 7/0057 (2013.01); B24B 27/06 (2013.01); B28D 5/0076 (2013.01); B28D 5/02 (2013.01); H01L 21/02043 (2013.01); B23K 2101/40 (2018.08);
Abstract
A cutting apparatus includes a cutting unit that cuts a workpiece included in a frame unit, an ultraviolet ray irradiation unit that irradiates the frame unit with ultraviolet rays, and a control unit. The control unit includes a processing mode registration section in which commands to be output to components. The processing mode registration section registers therein a command in a cutting apparatus mode that causes the cutting unit to cut the workpiece and a command in an ultraviolet ray irradiation apparatus mode that causes the ultraviolet ray irradiation unit to irradiate the frame unit with ultraviolet rays.