The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Jun. 18, 2018
Asml Netherlands B.v., Veldhoven, NL;
An Gao, Eindhoven, NL;
Sanjaysingh Lalbahadoersing, Helmond, NL;
Andrey Alexandrovich Nikipelov, Eindhoven, NL;
Alexey Olegovich Polyakov, Veldhoven, NL;
Brennan Peterson, Longmont, CO (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus for determining information relating to at least one target alignment mark in a semiconductor device substrate. The target alignment mark is initially at least partially obscured by an opaque carbon or metal layer on the substrate. The apparatus includes an energy delivery system configured to emit a laser beam for modifying at least one portion of the opaque layer to cause a phase change and/or chemical change in the at least one portion that increases the transparency of the portion. An optical signal can propagate through the modified portion to determine information relating to the target alignment mark.