The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Aug. 27, 2015
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Martijn Petrus Christianus Van Heumen, Veldhoven, NL;
Sergii Denega, Veldhoven, NL;
Ralph Jozef Johannes Gerardus Anna Maria Smeets, Veldhoven, NL;
Remco Marcel Van Dijk, Veldhoven, NL;
Marc Van Kemenade, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 65/04 (2006.01); H01J 65/06 (2006.01); G01N 21/88 (2006.01); G01N 21/956 (2006.01); G03F 7/20 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G03F 7/70033 (2013.01); G03F 7/70575 (2013.01); G03F 7/70616 (2013.01); H01J 65/04 (2013.01); G01N 2021/95676 (2013.01);
Abstract
Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function () which is configured such that a spectral position of a peak output wavelength of a black body portion of output radiation emitted by said plasma within a desired wavelength band.