The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 02, 2021

Filed:

Jan. 31, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Cheng-Wei Cheng, White Plains, NY (US);

Pranita Kerber, Mount Kisco, NY (US);

Amlan Majumdar, White Plains, NY (US);

Yanning Sun, Scarsdale, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/205 (2006.01); H01L 29/66 (2006.01); H01L 21/306 (2006.01); H01L 21/762 (2006.01); H01L 29/51 (2006.01); H01L 29/45 (2006.01); H01L 29/417 (2006.01); H01L 21/265 (2006.01); H01L 29/207 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/205 (2013.01); H01L 21/2654 (2013.01); H01L 21/26586 (2013.01); H01L 21/30612 (2013.01); H01L 21/76224 (2013.01); H01L 29/0684 (2013.01); H01L 29/207 (2013.01); H01L 29/41783 (2013.01); H01L 29/452 (2013.01); H01L 29/511 (2013.01); H01L 29/665 (2013.01); H01L 29/6653 (2013.01); H01L 29/6656 (2013.01); H01L 29/66522 (2013.01);
Abstract

A semiconductor device comprises a first layer of a substrate arranged on a second layer of the substrate the second layer of the substrate including a doped III-V semiconductor material barrier layer, a gate stack arranged on a channel region of the first layer of a substrate, a spacer arranged adjacent to the gate stack on the first layer of the substrate, an undoped epitaxially grown III-V semiconductor material region arranged on the second layer of the substrate, and an epitaxially grown source/drain region arranged on the undoped epitaxially grown III-V semiconductor material region, and a portion of the first layer of the substrate.


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