The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 02, 2021

Filed:

Oct. 11, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Pouya Hashemi, White Plains, CT (US);

Matthias Georg Gottwald, New Rochelle, NY (US);

Alexander Reznicek, Troy, NY (US);

Chandrasekharan Kothandaraman, New York, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/22 (2006.01); H01L 43/08 (2006.01); H01L 43/10 (2006.01); H01L 43/02 (2006.01); H01L 43/12 (2006.01); G11C 11/15 (2006.01); G11C 11/56 (2006.01); G11C 11/16 (2006.01);
U.S. Cl.
CPC ...
H01L 27/222 (2013.01); G11C 11/5607 (2013.01); H01L 43/12 (2013.01); G11C 11/161 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01); H01L 43/10 (2013.01);
Abstract

Fabricating a magnetoresistive random access memory (MRAM) device includes receiving a wafer structure having a first inter-layer dielectric (ILD) layer and a metal material disposed within the first ILD layer. A second ILD layer is deposited upon a top surface of the first ILD layer and the metal material. A trench is formed within the second ILD layer extending to the top surface of the metal material. A plurality of magnetic stack layers of a magnetic stack and an electrode layer are deposited within the trench. Portions of each of the magnetic stack layers of the magnetic stack and the electrode layer are removed to form a v-shaped magnetic tunnel junction (MTJ) in contact with the metal material.


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