The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Mar. 23, 2017
Fujikin Incorporated, Osaka, JP;
Masaaki Nagase, Osaka, JP;
Kaoru Hirata, Osaka, JP;
Yohei Sawada, Osaka, JP;
Katsuyuki Sugita, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
A pressure-type flow rate control device includes a restriction part, a control valve disposed upstream of the restriction part, an upstream pressure sensor, a downstream pressure sensor, and a controller that diagnoses flow rate control by using pressure drop data on a flow passage between the control valve and the restriction part and reference pressure drop data, wherein a close command is issued to the control valve and a shutoff valve provided downstream of the downstream pressure sensor, and the controller determines whether a predetermined critical expansion condition is satisfied by using outputs of the upstream pressure sensor and the downstream pressure sensor after the control valve is closed, and diagnoses flow rate control by using the pressure drop data acquired during a period in which the predetermined critical expansion condition is satisfied.