The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Jul. 29, 2019
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventor:
Dror Shemesh, Hod Hasharon, IL;
Assignee:
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/22 (2018.01); G01N 23/2252 (2018.01); G01N 23/2206 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01); G01N 23/2206 (2013.01);
Abstract
A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.