The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Mar. 31, 2017
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Hiroyuki Shinozaki, Tokyo, JP;
Shuichi Kamata, Tokyo, JP;
Koichi Takeda, Tokyo, JP;
Ryuichi Kosuge, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/005 (2012.01); B24B 37/30 (2012.01); B24B 37/20 (2012.01);
U.S. Cl.
CPC ...
B24B 37/005 (2013.01); B24B 37/20 (2013.01); B24B 37/30 (2013.01);
Abstract
The present disclosure provides a substrate processing apparatus including: a substrate holding unit that holds a substrate; a pressure regulator that regulates a pressure of a gas supplied into an elastic membrane; and a controller that controls the pressure regulator to make the pressure of the gas supplied into the elastic membrane variable in order to separate the substrate from the elastic membrane.