The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2021

Filed:

Aug. 07, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jung-Gil Yang, Hwaseong-si, KR;

Geum-Jong Bae, Suwon-si, KR;

Dong-Il Bae, Seongnam-si, KR;

Seung-Min Song, Hwaseong-si, KR;

Woo-Seok Park, Ansan-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/092 (2006.01); H01L 29/06 (2006.01); H01L 21/8234 (2006.01); H01L 29/41 (2006.01); H01L 29/66 (2006.01); H01L 29/775 (2006.01); H01L 21/8238 (2006.01); H01L 27/088 (2006.01); H01L 29/786 (2006.01); H01L 29/423 (2006.01); H01L 29/165 (2006.01); H01L 29/20 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0924 (2013.01); H01L 21/82385 (2013.01); H01L 21/823456 (2013.01); H01L 21/823468 (2013.01); H01L 21/823864 (2013.01); H01L 27/088 (2013.01); H01L 27/092 (2013.01); H01L 29/0669 (2013.01); H01L 29/0673 (2013.01); H01L 29/413 (2013.01); H01L 29/66439 (2013.01); H01L 29/66742 (2013.01); H01L 29/66772 (2013.01); H01L 29/775 (2013.01); H01L 29/78696 (2013.01); H01L 21/823412 (2013.01); H01L 21/823807 (2013.01); H01L 29/0646 (2013.01); H01L 29/0653 (2013.01); H01L 29/165 (2013.01); H01L 29/20 (2013.01); H01L 29/42392 (2013.01); H01L 29/7853 (2013.01); H01L 2924/13086 (2013.01);
Abstract

A semiconductor device includes a first transistor in a first region and a second transistor in a second region. The first transistor includes: a first nanowire, a first gate electrode, a first gate dielectric layer, a first source/drain region, and an inner-insulating spacer. The first nanowire has a first channel region. The first gate electrode surrounds the first nanowire. The first gate dielectric layer is between the first nanowire and the first gate electrode. The first source/drain region is connected to an edge of the first nanowire. The inner-insulating spacer is between the first gate dielectric layer and the first source/drain region. The second transistor includes a second nanowire, a second gate electrode, a second gate dielectric layer, and a second source/drain region. The second nanowire has a second channel region. The second gate electrode surrounds the second nanowire. The second gate dielectric layer is between the second nanowire and the second gate electrode. The second source/drain region is connected to an edge of the second nanowire.


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