The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Nov. 30, 2017
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Olivier Rozeau, Moirans, FR;
Marie-Anne Jaud, Claix, FR;
Joris Lacord, La Murette, FR;
Sébastien Martinie, Saint-Martin le Vinoux, FR;
Thierry Poiroux, Voiron, FR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01B 21/08 (2006.01); G01B 15/02 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 29/775 (2006.01); H01L 29/786 (2006.01); G01N 23/2251 (2018.01); B82Y 10/00 (2011.01); G01R 29/24 (2006.01); B82Y 35/00 (2011.01); B82Y 30/00 (2011.01); G01R 31/26 (2020.01);
U.S. Cl.
CPC ...
G01N 27/228 (2013.01); B82Y 10/00 (2013.01); G01B 15/02 (2013.01); G01B 21/08 (2013.01); G01N 23/2251 (2013.01); G01N 27/221 (2013.01); H01L 29/0673 (2013.01); H01L 29/42392 (2013.01); H01L 29/66439 (2013.01); H01L 29/775 (2013.01); H01L 29/78696 (2013.01); B82Y 30/00 (2013.01); B82Y 35/00 (2013.01); G01B 2210/56 (2013.01); G01R 29/24 (2013.01); G01R 31/2603 (2013.01); G01R 31/2621 (2013.01); Y10S 977/755 (2013.01); Y10S 977/762 (2013.01); Y10S 977/881 (2013.01); Y10S 977/901 (2013.01); Y10S 977/938 (2013.01);
Abstract
Embodiments of the invention determine intrinsic parameters of stacked nanowires/nanosheets GAA MOSFETs comprising Nnanowires and/or nanosheets, each nanowire/nanosheet being surrounded in an oxide layer, the oxide layers being embedded in a common gate, wherein the method comprises the following steps: