The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Apr. 06, 2017
Dnf Co., Ltd., Daejeon, KR;
Myong Woon Kim, Daejeon, KR;
Sang Ick Lee, Daejeon, KR;
Won Mook Chae, Daejeon, KR;
Sang Jun Yim, Cheongju-si, KR;
Kang Yong Lee, Sejong, KR;
A Ra Cho, Gwangju, KR;
Sang Yong Jeon, Sejong, KR;
Haeng Don Lim, Daejeon, KR;
DNF CO., LTD., Daejeon, KR;
Abstract
The present invention relates to: a novel transition metal compound; a preparation method therefor; a composition for depositing a transition metal-containing thin film, containing the same; a transition metal-containing thin film using the composition for depositing a transition metal-containing thin film; and a method for preparing a transition metal-containing thin film. The transition metal compound of the present invention has high thermal stability, high volatility, and high storage stability, and thus a transition metal-containing thin film having high-density and high-purity can be easily prepared by using the same as a precursor.