The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Sep. 13, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Kaushik Alayavalli, Sunnyvale, CA (US);
Ajit Balakrishna, Santa Clara, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Amit Kumar Bansal, Milpitas, CA (US);
Matthew James Busche, Santa Clara, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Swaminathan T. Srinivasan, Pleasanton, CA (US);
Tejas Ulavi, San Jose, CA (US);
Jianhua Zhou, Campbell, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Implementations of the disclosure generally relate to a semiconductor processing chamber and, more specifically, a heated support pedestal for a semiconductor processing chamber. In one implementation, a pedestal assembly is disclosed and includes a substrate support comprising a dielectric material and having a support surface for receiving a substrate, a resistive heater encapsulated within the substrate support, a hollow shaft coupled to a support member of the substrate support at a first end of the shaft, and a thermally conductive material disposed at an interface between the support member and the first end of the shaft.