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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10910225 B1

PDFFull Text
Date of Patent:
Feb. 02, 2021

Filed:

Nov. 27, 2018

Film forming method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Kensaku Narushima, Nirasaki, JP;

Atsushi Matsumoto, Nirasaki, JP;

Nagayasu Hiramatsu, Hillsboro, OR (US);

Takanobu Hotta, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Marvin Payen

Int. Cl.
CPC ...
H01L 21/285 (2006.01); C23C 16/34 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); H01L 21/768 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28556 (2013.01); C23C 16/34 (2013.01); C23C 16/4412 (2013.01); C23C 16/45534 (2013.01); C23C 16/45553 (2013.01); C23C 16/45561 (2013.01); H01L 21/28088 (2013.01); H01L 21/76843 (2013.01);
Abstract

There is provided a method of forming a tungsten nitride film on a substrate to be processed, including: forming a tungsten film by repeating a cycle of alternately supplying a tungsten chloride gas and a hydrogen-containing gas with a supply of a purge gas interposed between the supply of the tungsten chloride gas and the supply of the hydrogen-containing gas; and nitriding the tungsten film by supplying a nitrogen-containing gas.

Find Patent Forward Citations

Narushima, Kensaku. (2021). Film forming method (U.S. Patent No. 10910225). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10910225

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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