The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Jun. 30, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Naoki Watanabe, Nirasaki, JP;
Tatsuo Hatano, Nirasaki, JP;
Shinji Furukawa, Nirasaki, JP;
Naoyuki Suzuki, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 14/56 (2006.01); C23C 14/50 (2006.01); C23C 14/34 (2006.01); H01L 43/12 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02225 (2013.01); C23C 14/3464 (2013.01); C23C 14/505 (2013.01); C23C 14/568 (2013.01); H01L 21/28061 (2013.01); H01L 21/28202 (2013.01); H01L 43/12 (2013.01);
Abstract
There is provided a method of forming an insulating film which includes providing a workpiece having a base portion and a protuberance portion formed to protrude from the base portion; and forming an insulating film on the workpiece by sputtering. The forming an insulating film includes forming the insulating film while changing an angle defined between the workpiece and a target.