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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10907864 B1

PDFFull Text
Date of Patent:
Feb. 02, 2021

Filed:

Mar. 28, 2019

Cooling system

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Takehiko Arita, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Pearne & Gordon LLP

Primary Examiner:

Christopher R Zerphey

Int. Cl.
CPC ...
F25B 7/00 (2006.01); F25B 9/00 (2006.01); F25B 49/02 (2006.01); H01L 21/683 (2006.01); F25B 41/04 (2006.01); F25B 6/04 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F25B 7/00 (2013.01); F25B 9/006 (2013.01); F25B 49/02 (2013.01); H01L 21/683 (2013.01); F25B 2400/077 (2013.01); F25B 2400/23 (2013.01);
Abstract

A cooling system includes a heat exchange unit; a supply line configured to send a coolant to the heat exchange unit; a drain line configured to send the coolant drained from the heat exchange unit; a first to a ngas-liquid separating units connected in series to a gas line in which a gas of the coolant flows; a first to a ncooling lines extended via the first to the ngas-liquid separating units, respectively. Both ends of the first cooling line are connected to a cooling device. The second to the ncooling lines are provided between the drain line and a first to a (n−1)liquid lines via the second to the ngas-liquid separating units, respectively. The first to the ngas-liquid separating units are respectively connected to liquid lines, and the liquid lines communicate with the supply line connected to the heat exchange unit.

Find Patent Forward Citations

Arita, Takehiko. (2021). Cooling system (U.S. Patent No. 10907864). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10907864

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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