The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Oct. 29, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Subramaniam V. Iyer, Maharashtra, IN;
Dharma Ratnam Srichurnam, Karnataka, IN;
Devendrappa Holeyannavar, Bangalore, IN;
Douglas MacLeod, Los Altos, CA (US);
Kenneth Carpenter, Leander, TX (US);
Naveen Kumar, Bengaluru, IN;
Vivek R. Rao, Bengaluru, IN;
Patrick Pannese, Mountain View, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A method of purging a substrate carrier at a load port includes: opening a door of a substrate carrier that is delivered to a load port; spraying the substrate carrier with a gas flow responsive to the opening the door; mapping substrates within the substrate carrier to generate a substrate map; determining a process purge state based on the substrate map; and activating one or more inter-substrate nozzle arrays and one or more curtain nozzle arrays using a predefined spray status configuration for the process purge state.