The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2021

Filed:

Sep. 13, 2017
Applicants:

Polar Semiconductor, Llc, Bloomington, MN (US);

Sanken Electric Co., Ltd., Saitama, JP;

Inventors:

Peter West, Minneapolis, MN (US);

Dosi Dosev, Woodbury, MN (US);

Don Rankila, Farmington, MN (US);

Tatsuya Kamimura, St. Louis Park, MN (US);

Steve Kosier, Lakeville, MN (US);

Assignees:

Polar Semiconductor, LLC, Bloomington, MN (US);

Sanken Electric Co., Ltd., Saitama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 29/78 (2006.01); H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 24/05 (2013.01); H01L 24/03 (2013.01); H01L 24/85 (2013.01); H01L 29/407 (2013.01); H01L 29/7827 (2013.01); H01L 29/7828 (2013.01); H01L 23/3171 (2013.01); H01L 24/48 (2013.01); H01L 29/4236 (2013.01); H01L 2224/03013 (2013.01); H01L 2224/04042 (2013.01); H01L 2224/05073 (2013.01); H01L 2224/05567 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/48247 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/30105 (2013.01);
Abstract

Apparatus and associated methods relate to a bond-pad structure having small pad-substrate capacitance for use in high-voltage MOSFETs. The bond-pad structure includes upper and lower polysilicon plates interposed between a metal bonding pad and an underlying semiconductor substrate. The lower polysilicon plate is encapsulated in dielectric materials, thereby rendering it floating. The upper polysilicon plate is conductively coupled to a source of the high-voltage MOSFET. A perimeter of the metal bonding pad is substantially circumscribed, as viewed from a plan view perspective, by a perimeter of the upper polysilicon plate. A perimeter of the upper polysilicon plate is substantially circumscribed, as viewed from the plan view perspective, by a perimeter of the lower polysilicon plate. In some embodiments, the metal bonding pad is conductively coupled to a gate of the high-voltage MOSFET. The pad-substrate capacitance is advantageously made small by this bond-pad structure.


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