The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Nov. 02, 2016
Asml Netherlands B.v., Veldhoven, NL;
Günes Nakiboglu, Eindhoven, NL;
Coen Hubertus Matheus Baltis, Eindhoven, NL;
Siegfried Alexander Tromp, Knegsel, NL;
Yuri Johannes Gabriël Van De Vijver, Best, NL;
Bert Dirk Scholten, Best, NL;
Daan Daniel Johannes Antonius Van Sommeren, Beuningen, NL;
Mark Johannes Hermanus Frencken, Ittervoort, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder including a main body having a main body surface; a plurality of burls projecting from the main body surface to support the substrate spaced apart from the main body surface; and a liquid control structure provided in a peripheral region of the main body surface and configured to cause liquid to preferentially flow toward the periphery of the main body surface.