The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2021

Filed:

Apr. 22, 2019
Applicant:

Shinko Electric Industries Co., Ltd., Nagano, JP;

Inventor:

Jun Furuichi, Nagano, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01L 23/13 (2006.01); H01L 23/29 (2006.01); H01L 23/538 (2006.01); H01L 25/065 (2006.01); H01L 23/48 (2006.01); H01L 21/48 (2006.01); H01L 21/683 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49838 (2013.01); H01L 21/486 (2013.01); H01L 21/4853 (2013.01); H01L 21/4857 (2013.01); H01L 21/6835 (2013.01); H01L 23/13 (2013.01); H01L 23/49816 (2013.01); H01L 23/49822 (2013.01); H01L 23/49866 (2013.01); H01L 24/16 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 2221/68345 (2013.01); H01L 2221/68359 (2013.01); H01L 2221/68372 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/73204 (2013.01); H01L 2924/35121 (2013.01);
Abstract

A first insulation layer includes a concave portion formed in a lower surface thereof. A first wiring layer is formed in the concave portion. A protective insulation layer has an opening configured to expose a part of the first wiring layer and is stacked on the lower surface of the first insulation layer. An adhesion layer is interposed between the first wiring layer and the protective insulation layer and has higher adhesiveness with the protective insulation layer than the first wiring layer. The first wiring layer includes a pad portion formed in the concave portion and a protrusion protruding from a portion of a lower surface of the pad portion into the opening. The adhesion layer is formed to cover the lower surface of the pad portion and a side surface of the protrusion and to expose a lower end face of the protrusion.


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