The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Jun. 26, 2017
Applicant:
Fujimi Incorporated, Aichi, JP;
Inventor:
Yasuto Ishida, Aichi, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/37 (2006.01); C11D 1/34 (2006.01); H01L 21/304 (2006.01); C11D 11/00 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
C11D 1/345 (2013.01); C11D 1/34 (2013.01); C11D 3/37 (2013.01); C11D 3/3784 (2013.01); C11D 11/0047 (2013.01); H01L 21/02057 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01);
Abstract
The present invention is to provide a means with which foreign matters remaining on a surface of a polished object to be polished can be sufficiently removed. The present invention relates to a composition for surface treatment for a polished object to be polished, including: a (co)polymer containing a structural unit A having a phosphonic acid group and a divalent (poly)oxyhydrocarbon group or a salt thereof; and water, wherein a content of the structural units A exceeds 50% by mole relative to the total structural units forming the (co)polymer.